The Role of High-Purity Piping in Semiconductor Manufacturing
Semiconductor manufacturing is one of the most precision-driven industries in the world and the infrastructure supporting it must operate with zero margin for error. At the heart of this infrastructure is high-purity process piping, responsible for delivering ultra-clean gases, chemicals, and water to critical tools on the fab floor.
Why High-Purity Piping is Critical
In semiconductor fabs, even a trace amount of contamination such as metallic ions, moisture, or particles can result in defective wagers or reduced yields. To prevent this:
Ultra-pure gases (e.g., nitrogen, hydrogen, silane) must be delivered without any contamination or moisture.
Ultra-pure water (UPW) must remain free of dissolved solids and organic material.
Chemical delivery lines must resist corrosion and maintain chemical integrity at all times.
This level of purity is only achievable with carefully engineered piping systems, stringent welding protocols, and comprehensive QA/QC.
Material Selection: Built for Cleanliness and Compatibility
The most commonly used materials in high-purity piping systems are:
316L Stainless Steel
Preferred for high-purity and UPW lines.
Offers excellent corrosion resistance and is compatible with orbital welding.
Low-carbon version (L-grade) minimizes carbide precipitation during welding.
PVDF and PFA (Fluoropolymers)
Used for aggressive chemicals like solvents and acids.
Offer excellent chemical resistance and smooth internal surfaces to reduce particle adhesion.
Electropolised (EP) or Mechanically Polished (MP) Tubing
Surac finishes as low as Ra 10 µin (0.25 µm) to prevent particle entrapment
Electropolishing also enhances corrosion resistance by removing surface impurities
Material selection must also consider media compatibility, temperature and pressure ratings, and cleanroom suitability.
Orbital Welding: Precision without Compromise
Welding is one of the most critical steps in high-purity piping installation. Orbital welding is the industry standard due to its:
Repeatability - Automated process ensures consistent weld profiles.
Purity - Welds are performed in inert gas (argon) environments to prevent oxidation.
Precision - Seamless fusion reduces the risk of particle shedding or corrosion.
Key factors include:
100% argon gas purge on ID/OD during welding.
Use of remote video inspection to verify weld penetration and uniformity.
Pre-weld cleaning of pipe ends and tools to eliminate contamination.
Each weld is tracked and logged to maintain a full weld history record, which is often required for traceability in semiconductor projects.
Inspection and Testing: No Room for Error
After installation, all high-purity piping must undergo rigorous inspection and testing:
Borescope Inspection
Internal pipe surfaces and weld beads are virtually inspected
Identifies discoloration, lack of penetration, or inclusions
Helium Leak Testing
Pressurizes the system with helium and uses mass spectrometry to detect leaks
Pressure Testing and Purge Validation
Verifies integrity and cleanliness of systems before hookup
Nitrogen purging is validated to meet moisture/oxygen ppm targets
Documentation and Certification
Cleanroom-compatible install logs, weld maps, and test reports are provided to facility QA teams.
Integration with Tool Hookup
Once validated, these piping systems are integrated directly into tools such as etchers, deposition chambers, and metrology equipment. This step requies:
Close coordination with OEMs and facilities teams
Use of cleanroom-qualified hose assemblies and connections
Real-time inspections and validation to ensure operational readiness
BBTech America’s tool hookup teams are trained in high-purity standards and collaborate across trades to bring each process tool online with precision.
High-purity piping may be hidden behind walls and ceilings, but it’s one of the most essential systems in any fab. Poorly executed piping can compromise entire production lines, while expertly installed systems ensure maximum yield, uptime, and product quality.
At BBTech America, we specialize in design, fabrication, and installation of high-purity piping systems for semiconductor and secondary battery facilities. Our team combines decades of experience with state-of-the-art tools to deliver flawless results, every time.
